Tilting micromirror platform based on liquid dielectrophoresis

This study presents an electrically actuated tilting micro platform based on liquid dielectrophoresis with three axes movement using droplets situated 120° apart from each other. The interdigitated electrodes produce a non-uniform electric field that generates body force. dielectrophoretic mechanism is responsive within at least 30 ms, and it eliminates the solid-solid contact. enabled angular coverage up to 0.9° (±0.02°), maximum displacement of 120 µm. micromirror has beam steering characteristics suitable for various optical applications. actuating sensor cost-effective simple alternative method without measuring droplet contact angle. Furthermore, unique configuration any offers potential improvement applications in optics, actuators, other conventional microelectromechanical systems.